Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions

Cathodic Arc Synthesis of Ti-Si-C-N Thin Films Plasma Analysis and Microstructure Formation

ii The cover image is based on a photograph of arc spots moving on the surface of a Ti cathode, taken during the first experimental session in our new PVD research system, Hydra. The explosive plasma generation in the arc spots is central to the cathodic arc deposition technique, studied and used extensively for synthesis in the Thesis. Abstract This Thesis explores the arc deposition process a...

Comparison of Properties of Ti/TiN/TiCN/TiAlN Film Deposited by Cathodic Arc Physical Vapor and Plasma-assisted Chemical Vapor Deposition on Custom 450 Steel Substrates

This study investigated the effects of deposition techniques on the microstructural and tribological properties of Ti/TiN/TiCN/TiAlN multilayer coatings onto a Custom 450 steel substrate. The coatings were produced using cathodic arc physical vapor deposition (CAPVD) and plasma-assisted chemical vapor deposition (PACVD). The microstructural of the coatings was evaluated using (SEM), and phase f...

Characterization of TiN, CrN and (Ti, Cr) N Coatings Deposited by Cathodic ARC Evaporation

In this investigation PVD Ti-Cr)N coatings were deposited on hardened and tempered tool steel substrates using reactive arc evaporation. Physical and mechanical properties of coatings such as roughness, thickness, phase composition, hardness and modulus young and coefficient friction were evaluated. Phase compositions were studies by X-ray diffraction method. The surface microstructure and morp...

Cathodic Arc Synthesis of Ti-Si-C-N Thin Films from Ternary Cathodes

COMPARISON OF THE CrN , TiN AND (Ti, Cr)N PVD COATINGS DEPOSITED BY CATHODIC ARC EVAPORATION

In the present study, CrN, TiN and (Ti, Cr)N coatings were deposited on D6 tool steel substrates. Physical and mechanical properties of coatings such as microstructure, thickness, phase composition, and hardness were evaluated. Phase compositions were studies by X-ray diffraction method. Mechanical properties were determined by nano-indentation technique. The friction and wear behaviour of the ...